• Sales of Imported Semiconductor Manufacturing Equipment
• Sales of Imported LCD Displayer Manufacturing Equipment
• Installation and Maintenance Services of the Sales Items
• Operational and Maintenance Training for Clients

Canon microlithography tools, called steppers and scanners, are used primarily in the process of making integrated circuit (IC) devices. In chip making, a stepper or scanner projects hundreds of identical images, patterns of a circuit layer from a photomask, one at a time, across the entire surface of a silicon wafer, which is then "developed," etched, cleaned, doped, metallized and polished. This process will be repeated as many times on additional layers until the ICs are completely formed. Typically, the number and complexity of features on each layer varies, so every IC device and process requires an integrated suite of imaging tools to achieve the most cost-effective volume production. Canon has steppers and scanners for use at every technology node from very rough layers requiring only 350nm resolution, to critical layers requiring 90nm. These tools handle wafer sizes up to 300mm diameter.

Cannon LCD displayer manufacturing equipment Mirror Projection Aligner (MPA), and through major reflective optic system and high-speed no-contact linear motors, it reaches high-speed, high-precision extra-large glass plate exposure: 2,200mm x 2,500mm. With total exposure, one plate can produce three 57-inch wide TV display pannel s, eight 45-inch wide TV display pannels, or eighteen 32-inch wide TV display pannels.

(2008/10/1 )